TY  - RPRT
TI  - Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy.
AU  - P Gall-Borrut
AU  - B Belier
AU  - P Falgayrettes
AU  - M Castagne
AU  - C Bergaud
AU  - P Temple-Boyer
PY  - 2001
DO  - 10.1046/j.1365-2818.2001.00802.x
UR  - https://pubmed.ncbi.nlm.nih.gov/11298866/
ID  - 11298866
ER  -