@misc{indiciaea0f6db43c0ce,
  title = {Modified fabrication process for aperture probe cantilevers.},
  author = {A Vollkopf and O Rudow and T Leinhos and C Mihalcea and E Oesterschulze},
  doi = {10.1046/j.1365-2818.1999.00535.x},
  url = {https://pubmed.ncbi.nlm.nih.gov/11388264/},
  note = {Source identifier: 11388264}
}