@misc{indiciae1a1460bbf6ed,
  title = {Nanocomputing. Optical lithography goes to extremes--and beyond.},
  author = {R F Service},
  year = {2001},
  doi = {10.1126/science.293.5531.785},
  url = {https://pubmed.ncbi.nlm.nih.gov/11486068/},
  note = {Source identifier: 11486068}
}