TY  - RPRT
TI  - Nanocomputing. Optical lithography goes to extremes--and beyond.
AU  - R F Service
PY  - 2001
DO  - 10.1126/science.293.5531.785
UR  - https://pubmed.ncbi.nlm.nih.gov/11486068/
ID  - 11486068
ER  -