@misc{indiciae97decf35e39f,
  title = {Finer features for functional microdevices.},
  author = {S Kawata and H B Sun and T Tanaka and K Takada},
  year = {2001},
  doi = {10.1038/35089130},
  url = {https://pubmed.ncbi.nlm.nih.gov/11507627/},
  note = {Source identifier: 11507627}
}