@misc{indiciae8b9e0002f52a,
  title = {Limits on silicon nanoelectronics for terascale integration.},
  author = {J D Meindl and Q Chen and J A Davis},
  year = {2001},
  doi = {10.1126/science.293.5537.2044},
  url = {https://pubmed.ncbi.nlm.nih.gov/11557881/},
  note = {Source identifier: 11557881}
}