TY - RPRT TI - Limits on silicon nanoelectronics for terascale integration. AU - J D Meindl AU - Q Chen AU - J A Davis PY - 2001 DO - 10.1126/science.293.5537.2044 UR - https://pubmed.ncbi.nlm.nih.gov/11557881/ ID - 11557881 ER -