@misc{indiciae41a943d1930e, title = {Defect generation by hydrogen at the Si- SiO(2) interface.}, author = {S N Rashkeev and D M Fleetwood and R D Schrimpf and S T Pantelides}, year = {2001}, doi = {10.1103/physrevlett.87.165506}, url = {https://pubmed.ncbi.nlm.nih.gov/11690213/}, note = {Source identifier: 11690213} }