@misc{indiciae16a1c014f3b7, title = {Oxygen diffusion through the disordered oxide network during silicon oxidation.}, author = {Angelo Bongiorno and Alfredo Pasquarello}, year = {2002}, doi = {10.1103/physrevlett.88.125901}, url = {https://pubmed.ncbi.nlm.nih.gov/11909480/}, note = {Source identifier: 11909480} }