TY - RPRT TI - Oxygen diffusion through the disordered oxide network during silicon oxidation. AU - Angelo Bongiorno AU - Alfredo Pasquarello PY - 2002 DO - 10.1103/physrevlett.88.125901 UR - https://pubmed.ncbi.nlm.nih.gov/11909480/ ID - 11909480 ER -