@misc{indiciae19bb257c46c6, title = {Spatially-resolved EELS analysis of multilayer using EFTEM and STEM.}, author = {K Kimoto and S Isakozawa and T Aoyama and Y Matsui}, year = {2001}, doi = {10.1093/jmicro/50.6.523}, url = {https://pubmed.ncbi.nlm.nih.gov/11918419/}, note = {Source identifier: 11918419} }