TY - RPRT TI - Spatially-resolved EELS analysis of multilayer using EFTEM and STEM. AU - K Kimoto AU - S Isakozawa AU - T Aoyama AU - Y Matsui PY - 2001 DO - 10.1093/jmicro/50.6.523 UR - https://pubmed.ncbi.nlm.nih.gov/11918419/ ID - 11918419 ER -