@misc{indiciaeb4ba133ff059,
  title = {Automatic integrated circuit die positioning in the scanning electron microscope.},
  author = {H W Tan and J C H Phang and J T L Thong},
  doi = {10.1002/sca.4950240206},
  url = {https://pubmed.ncbi.nlm.nih.gov/11998906/},
  note = {Source identifier: 11998906}
}