TY  - RPRT
TI  - Automatic integrated circuit die positioning in the scanning electron microscope.
AU  - H W Tan
AU  - J C H Phang
AU  - J T L Thong
DO  - 10.1002/sca.4950240206
UR  - https://pubmed.ncbi.nlm.nih.gov/11998906/
ID  - 11998906
ER  -