@misc{indiciaeef214d05bf2a,
  title = {A fast automatic RBS/w channeling system for damage depth profiling.},
  author = {H Niu and L G Yuan and W T Chou and J H Liang and S C Wu},
  year = {2002},
  doi = {10.1016/s0969-8043(01)00240-8},
  url = {https://pubmed.ncbi.nlm.nih.gov/11999162/},
  note = {Source identifier: 11999162}
}