@misc{indiciae9ac257f5411d,
  title = {Use of emission electron microscope for potential mapping in semiconductor microelectronics.},
  author = {S A Nepijko and N N Sedov and G Schönhense and M Escher},
  year = {2002},
  doi = {10.1046/j.1365-2818.2002.01012.x},
  url = {https://pubmed.ncbi.nlm.nih.gov/12000552/},
  note = {Source identifier: 12000552}
}