TY - RPRT TI - Use of emission electron microscope for potential mapping in semiconductor microelectronics. AU - S A Nepijko AU - N N Sedov AU - G Schönhense AU - M Escher PY - 2002 DO - 10.1046/j.1365-2818.2002.01012.x UR - https://pubmed.ncbi.nlm.nih.gov/12000552/ ID - 12000552 ER -