@misc{indiciae601b33b9dfd3,
  title = {Micro-electro-mechanical system-based digitally controlled optical beam profiler.},
  author = {Sarun Sumriddetchkajorn and Nabeel A Riza},
  year = {2002},
  doi = {10.1364/ao.41.003506},
  url = {https://pubmed.ncbi.nlm.nih.gov/12078673/},
  note = {Source identifier: 12078673}
}