TY  - RPRT
TI  - Micro-electro-mechanical system-based digitally controlled optical beam profiler.
AU  - Sarun Sumriddetchkajorn
AU  - Nabeel A Riza
PY  - 2002
DO  - 10.1364/ao.41.003506
UR  - https://pubmed.ncbi.nlm.nih.gov/12078673/
ID  - 12078673
ER  -