@misc{indiciae9b766a250faa,
  title = {Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope.},
  author = {Dalip Singh Mehta and Masaya Sugai and Hideki Hinosugi and Shohei Saito and Mitsuo Takeda and Takashi Kurokawa and Hideki Takahashi and Masahito Ando and Masataka Shishido and Tetsuo Yoshizawa},
  year = {2002},
  doi = {10.1364/ao.41.003874},
  url = {https://pubmed.ncbi.nlm.nih.gov/12099595/},
  note = {Source identifier: 12099595}
}