TY  - RPRT
TI  - Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope.
AU  - Dalip Singh Mehta
AU  - Masaya Sugai
AU  - Hideki Hinosugi
AU  - Shohei Saito
AU  - Mitsuo Takeda
AU  - Takashi Kurokawa
AU  - Hideki Takahashi
AU  - Masahito Ando
AU  - Masataka Shishido
AU  - Tetsuo Yoshizawa
PY  - 2002
DO  - 10.1364/ao.41.003874
UR  - https://pubmed.ncbi.nlm.nih.gov/12099595/
ID  - 12099595
ER  -