@misc{indiciaeeb8256a0d0ca,
  title = {Fabry-perot-type antireflective coating for deep-ultraviolet binary photomask applications.},
  author = {Hsuen-Li Chen and Tieh-Chi Chu and Chien-Kui Hsu and Fu-Hsiang Ko and Tiao-Yuan Huang},
  year = {2002},
  doi = {10.1364/ao.41.003961},
  url = {https://pubmed.ncbi.nlm.nih.gov/12099606/},
  note = {Source identifier: 12099606}
}