TY  - RPRT
TI  - Fabry-perot-type antireflective coating for deep-ultraviolet binary photomask applications.
AU  - Hsuen-Li Chen
AU  - Tieh-Chi Chu
AU  - Chien-Kui Hsu
AU  - Fu-Hsiang Ko
AU  - Tiao-Yuan Huang
PY  - 2002
DO  - 10.1364/ao.41.003961
UR  - https://pubmed.ncbi.nlm.nih.gov/12099606/
ID  - 12099606
ER  -