@misc{indiciaee3796c563349,
  title = {iTIRM as a tool for qualifying polishing processes.},
  author = {Oliver W Fähnle and Torsten Wons and Evelyn Koch and Sebastién Debruyne and Mark Meeder and Silvia M Booij and Joseph J M Braat},
  year = {2002},
  doi = {10.1364/ao.41.004036},
  url = {https://pubmed.ncbi.nlm.nih.gov/12099615/},
  note = {Source identifier: 12099615}
}