@misc{indiciaee1e51f02596a,
  title = {Applied physics. Testing the limits for resists.},
  author = {Elsa Reichmanis and Omkaram Nalamasu},
  year = {2002},
  doi = {10.1126/science.1073842},
  url = {https://pubmed.ncbi.nlm.nih.gov/12130770/},
  note = {Source identifier: 12130770}
}