TY  - RPRT
TI  - Applied physics. Testing the limits for resists.
AU  - Elsa Reichmanis
AU  - Omkaram Nalamasu
PY  - 2002
DO  - 10.1126/science.1073842
UR  - https://pubmed.ncbi.nlm.nih.gov/12130770/
ID  - 12130770
ER  -