@misc{indiciae8c1ecac637a4, title = {Nanochemical surface analyzer in CMOS technology.}, author = {W Frank and D Lange and S Lee and A Hierlemann and N Spencer and H Baltes}, year = {2002}, doi = {10.1016/s0304-3991(02)00078-5}, url = {https://pubmed.ncbi.nlm.nih.gov/12211470/}, note = {Source identifier: 12211470} }