@misc{indiciae7c608526b07b,
  title = {A complementary-metal-oxide-semiconductor-field-effect-transistor-compatible atomic force microscopy tip fabrication process and integrated atomic force microscopy cantilevers fabricated with this process.},
  author = {Mizuki Ono and Dirk Lange and Oliver Brand and Christoph Hagleitner and Henry Baltes},
  year = {2002},
  doi = {10.1016/s0304-3991(02)00077-3},
  url = {https://pubmed.ncbi.nlm.nih.gov/12211489/},
  note = {Source identifier: 12211489}
}