TY  - RPRT
TI  - A complementary-metal-oxide-semiconductor-field-effect-transistor-compatible atomic force microscopy tip fabrication process and integrated atomic force microscopy cantilevers fabricated with this process.
AU  - Mizuki Ono
AU  - Dirk Lange
AU  - Oliver Brand
AU  - Christoph Hagleitner
AU  - Henry Baltes
PY  - 2002
DO  - 10.1016/s0304-3991(02)00077-3
UR  - https://pubmed.ncbi.nlm.nih.gov/12211489/
ID  - 12211489
ER  -