@misc{indiciae2ed18415c6a4,
  title = {Differential wavelength-scanning heterodyne interferometer for measuring large step height.},
  author = {Sheng-Hua Lu and Ching-I Chiueh and Cheng-Chung Lee},
  year = {2002},
  doi = {10.1364/ao.41.005866},
  url = {https://pubmed.ncbi.nlm.nih.gov/12371543/},
  note = {Source identifier: 12371543}
}