TY  - RPRT
TI  - Differential wavelength-scanning heterodyne interferometer for measuring large step height.
AU  - Sheng-Hua Lu
AU  - Ching-I Chiueh
AU  - Cheng-Chung Lee
PY  - 2002
DO  - 10.1364/ao.41.005866
UR  - https://pubmed.ncbi.nlm.nih.gov/12371543/
ID  - 12371543
ER  -