TY - RPRT TI - High-precision shape measurement by white-light interferometry with real-time scanner error correction. AU - Joanna Schmit AU - Artur Olszak PY - 2002 DO - 10.1364/ao.41.005943 UR - https://pubmed.ncbi.nlm.nih.gov/12371554/ ID - 12371554 ER -