@misc{indiciaee697fa6f984d, title = {O2 plasma treated polyimide-based humidity sensors.}, author = {Takeharu Suzuki and Philip Tanner and David V Thiel}, year = {2002}, doi = {10.1039/b205085d}, url = {https://pubmed.ncbi.nlm.nih.gov/12430607/}, note = {Source identifier: 12430607} }