@misc{indiciae9ab4c212778c,
  title = {Semiconductor dopant profiling by off-axis electron holography.},
  author = {Jing Li and M R McCartney and David J Smith},
  doi = {10.1016/s0304-3991(02)00260-7},
  url = {https://pubmed.ncbi.nlm.nih.gov/12505763/},
  note = {Source identifier: 12505763}
}