TY  - RPRT
TI  - Semiconductor dopant profiling by off-axis electron holography.
AU  - Jing Li
AU  - M R McCartney
AU  - David J Smith
DO  - 10.1016/s0304-3991(02)00260-7
UR  - https://pubmed.ncbi.nlm.nih.gov/12505763/
ID  - 12505763
ER  -