@misc{indiciae5f7ed4731a73,
  title = {Structural evolution in amorphous silicon and germanium thin films.},
  author = {L J Chen and S L Cheng and C H Yu and P Y Su and H H Lin and K S Chi},
  year = {2002},
  doi = {10.1017/s1431927602020202},
  url = {https://pubmed.ncbi.nlm.nih.gov/12533224/},
  note = {Source identifier: 12533224}
}