@misc{indiciae7fc3f011b182,
  title = {Optical diagnostics for thin film processing.},
  author = {Irving P Herman},
  year = {2002},
  doi = {10.1146/annurev.physchem.54.011002.103824},
  url = {https://pubmed.ncbi.nlm.nih.gov/12574493/},
  note = {Source identifier: 12574493}
}