TY  - RPRT
TI  - Optical diagnostics for thin film processing.
AU  - Irving P Herman
PY  - 2002
DO  - 10.1146/annurev.physchem.54.011002.103824
UR  - https://pubmed.ncbi.nlm.nih.gov/12574493/
ID  - 12574493
ER  -