TY - RPRT TI - Gray-scale photolithography using microfluidic photomasks. AU - Chihchen Chen AU - Danny Hirdes AU - Albert Folch PY - 2003 DO - 10.1073/pnas.0435755100 UR - https://pubmed.ncbi.nlm.nih.gov/12574512/ ID - 12574512 ER -