@misc{indiciae7e58d43a6bbe,
  title = {Backside contacted field effect transistor array for extracellular signal recording.},
  author = {S Ingebrandt and C K Yeung and W Staab and T Zetterer and A Offenhäusser},
  year = {2003},
  doi = {10.1016/s0956-5663(02)00155-0},
  url = {https://pubmed.ncbi.nlm.nih.gov/12604260/},
  note = {Source identifier: 12604260}
}