@misc{indiciae5aabdf3a429d,
  title = {Wave-front correction methods for extreme-ultraviolet multilayer reflectors.},
  author = {Mandeep Singh and Matthieu F Bal and Joseph J M Braat and Denis Joyeux and Udo Dinger},
  year = {2003},
  doi = {10.1364/ao.42.001847},
  url = {https://pubmed.ncbi.nlm.nih.gov/12683765/},
  note = {Source identifier: 12683765}
}