@misc{indiciae09383ab52c60, title = {Optimization of a RF-generated CF4/O2 gas plasma sterilization process.}, author = {Klaus S Lassen and Bolette Nordby and Reinar GrĂ¼n}, year = {2003}, doi = {10.1002/jbm.b.10004}, url = {https://pubmed.ncbi.nlm.nih.gov/12687716/}, note = {Source identifier: 12687716} }