@misc{indiciae0b2b6fe55b96,
  title = {MSTAR: a submicrometer absolute metrology system.},
  author = {O P Lay and S Dubovitsky and R D Peters and J P Burger and S W Ahn and W H Steier and H R Fetterman and Y Chang},
  year = {2003},
  doi = {10.1364/ol.28.000890},
  url = {https://pubmed.ncbi.nlm.nih.gov/12816236/},
  note = {Source identifier: 12816236}
}