@misc{indiciae0f608a9ef3b1, title = {Electrostatic nanolithography in polymers using atomic force microscopy.}, author = {Sergei F Lyuksyutov and Richard A Vaia and Pavel B Paramonov and Shane Juhl and Lynn Waterhouse and Robert M Ralich and Grigori Sigalov and Erol Sancaktar}, year = {2003}, doi = {10.1038/nmat926}, url = {https://pubmed.ncbi.nlm.nih.gov/12819776/}, note = {Source identifier: 12819776} }