@misc{indiciaefded376ab84e,
  title = {Optimized staircase profiles for diffractive optical devices made from absorbing materials.},
  author = {Bernd Nöhammer and Christian David and Jens Gobrecht and Hans Peter Herzig},
  year = {2003},
  doi = {10.1364/ol.28.001087},
  url = {https://pubmed.ncbi.nlm.nih.gov/12879916/},
  note = {Source identifier: 12879916}
}