TY  - RPRT
TI  - Optimized staircase profiles for diffractive optical devices made from absorbing materials.
AU  - Bernd Nöhammer
AU  - Christian David
AU  - Jens Gobrecht
AU  - Hans Peter Herzig
PY  - 2003
DO  - 10.1364/ol.28.001087
UR  - https://pubmed.ncbi.nlm.nih.gov/12879916/
ID  - 12879916
ER  -