@misc{indiciae367ab9e36e50,
  title = {Grating-enhanced through-wafer optical microprobe for microelectromechanical system high-resolution optical position feedback.},
  author = {J M Dawson and L Wang and P Famouri and L A Hornak},
  year = {2003},
  doi = {10.1364/ol.28.001263},
  url = {https://pubmed.ncbi.nlm.nih.gov/12885041/},
  note = {Source identifier: 12885041}
}