TY  - RPRT
TI  - Grating-enhanced through-wafer optical microprobe for microelectromechanical system high-resolution optical position feedback.
AU  - J M Dawson
AU  - L Wang
AU  - P Famouri
AU  - L A Hornak
PY  - 2003
DO  - 10.1364/ol.28.001263
UR  - https://pubmed.ncbi.nlm.nih.gov/12885041/
ID  - 12885041
ER  -