TY  - RPRT
TI  - Compensator quality control with an amorphous silicon EPID.
AU  - Geetha V Menon
AU  - Ron S Sloboda
PY  - 2003
DO  - 10.1118/1.1584040
UR  - https://pubmed.ncbi.nlm.nih.gov/12906200/
ID  - 12906200
ER  -