@misc{indiciae3ef6ee242958,
  title = {A high-frequency, 2-D array element using thermoelastic expansion in PDMS.},
  author = {Takashi Buma and Monica Spisar and Matthew O'Donnell},
  year = {2003},
  doi = {10.1109/tuffc.2003.1235327},
  url = {https://pubmed.ncbi.nlm.nih.gov/14561032/},
  note = {Source identifier: 14561032}
}